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| Untersuchte Arbeit: Seite: 17, Zeilen: 2-13 |
Quelle: Lääniläinen 2006 Seite(n): 1, Zeilen: 3-13 |
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| 2.1.5 Patterning techniques
The trend in electronics fabrication is continuously going towards smaller and smaller structures. Downscaling the size of the components increases their performance and density, lowers the power consumption and the cost. The dimensions in microfabrication are typically 0.1 – 100 μm. Microfabrication techniques are increasingly being used also outside traditional microelectronics, including microfluidics, microelectromechanical systems, such as microsensors, microactuators and micro-optics. Most research in microfabrication is still silicon-based, originating in microelectronics, but new materials and areas of research are also increasing like the use of gold substrate. Top down nano-fabrication is an extension to microfabrication, defined as the process of fabricating structures with the dimensions of 1 - 100 nm. The field of nanotechnology is growing rapidly, and new ideas are being introduced frequently. |
1 Introduction
1.1 Micro- and Nanotechnologies The trend in electronics fabrication is continuously going towards smaller and smaller structures. Downscaling the size of the components increases their performance and density, lowers the power consumption and the cost. The dimensions in microfabrication are typically 0.1 – 100 μm. The Microfabrication techniques are increasingly being used also outside traditional microelectronics, including microfluidics, microelectromechanical systems (MEMS), such as microsensors, microactuators and micro-optics. Most research in microfabrication is still silicon-based, originating in microelectronics, but new materials and areas of research are also increasing. Top down nanofabrication is an extension to microfabrication, defined as the process of fabricating structures with the dimensions of 1 – 100 nm. The field of nanotechnologies is growing rapidly, and new ideas are being introduced frequently. |
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