|
|
|
| Untersuchte Arbeit: Seite: 13, Zeilen: 5-17, fig 2-4 |
Quelle: Svanström 2007 Seite(n): 37-38, Zeilen: 37:3ff - 38:1-5; fig. 5-1 |
|---|---|
| Spin-Coating
Spin-coating is a process used for fabricating thin polymer films from solution. A drop of the polymer solution is dispensed onto a substrate, which is held fixed by means of vacuum onto a substrate holder (disc). The disc with the sample is then rotated at a high speed (from hundreds up to several thousands revolutions per minute). The spinning motion causes the solution to spread out and form a thin solid film on the substrate. After the initial deposition of the solution onto the substrate, the process can be broken down into three stages (Figure 2-4) [Law88]. 1. Acceleration 2. Film thinning 3. Drying [Figure] Figure 2-4. The stages of spin-coating, 0) deposition of solution, 1) spreading during acceleration to final spin speed, 2) film thinning by outflow and evaporation, 3) drying by evaporation. During the acceleration stage (1) excess fluid (~90%) is slung off until the film is thin enough to co-rotate with the substrate. The dispensed volume of solution and the [acceleration rate have little effect on the final thickness and uniformity of the film unless the acceleration rate is slow (~10 seconds or longer for the acceleration stage) [Fla84].] [Fla84] Flack, W.W.; Soong, D.S.; Bell, A.T.; Hess, D.W. J. Appl. Phys. 1984, 56, 1199. [Law88] Lawrence, C. J. Phys. Fluids 1988, 31, 2786. |
[page 37]
Chapter 5 Spin-coated thin films and phase separation 5.1 Spin-coating Spin-coating is a process used for fabricating thin polymer films from solution. A drop of the polymer solution is dispensed onto a substrate, which is held fixed by means of vacuum onto a substrate holder (disc). The disc with the sample is then rotated at a high speed (from hundreds up to several thousands revolutions per minute). The spinning motion causes the solution to spread out and form a thin solid film on the substrate. After the initial deposition of the solution onto the substrate, the process can be broken down into three stages (see Figure 5.1).[120] 1. Acceleration 2. Film thinning 3. Drying [page 38] [figure] Figure 5.1: The stages of spin-coating, 0) deposition of solution, 1) spreading during acceleration to final spin speed, 2) film thinning by outflow and evaporation, 3) drying by evaporation. During the acceleration stage (1) excess fluid (~90%) is slung off until the film is thin enough to co-rotate with the substrate. The dispensed volume of solution and the acceleration rate have little effect on the final thickness and uniformity of the film unless the acceleration rate is slow (~10 seconds or longer for the acceleration stage).[121] [120] C.J. Lawrence, Phys. Fluids 1988, 31, 2786. [121] W.W. Flack et al, J. Appl. Phys. 1984, 56, 1199. |
Though identical (including references) nothing has been marked as a citation. |
|